| Themes > Science > Physics > Molecular Physics > Excitation Energy Transfer and Energy Migration > Ionization > Atoms |
For constituent atoms present in plasma etching and deposition (F, Cl, Br, C, N, S, H, O), ionization cross sections have been measured to within ±20%. The situation is similar, if not better, for rare gases used as buffers and dilutants. Single ionization cross sections for all rare gases are known to better than 8%, for instance. Little ionization data is available for atoms in excited or metastable states,with the exception of laser-excited alkali atoms and metastable rare gases, H, N, and O. |
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